作者
Solomon Assefa,Steven M. Shank,William Green,Marwan Khater,E. Kiewra,Carol Reinholm,Swetha Kamlapurkar,Alexander V. Rylyakov,Clint L. Schow,Folkert Horst,Huapu Pan,Teya Topuria,Philip M. Rice,Douglas M. Gill,J.J. Rosenberg,Tymon Barwicz,Min Yang,Jonathan E. Proesel,Jens Hofrichter,Bert Jan Offrein,Xiaoxiong Gu,Wilfried Haensch,John Ellis-Monaghan,Yurii A. Vlasov
摘要
The first sub-100nm technology that allows the monolithic integration of optical modulators and germanium photodetectors as features into a current 90nm base high-performance logic technology node is demonstrated. The resulting 90nm CMOS-integrated Nano-Photonics technology node is optimized for analog functionality to yield power-efficient single-die multichannel wavelength-mulitplexed 25Gbps transceivers.