ZnO and Pd/ZnO photocatalysts with different molar ratio of Pd/Zn(1/100, 2/100 and 3/100)were prepared by photodeposition method. Photocatalysts prepared were studied by X-ray diffraction(XRD), UV/Vis diffuse reflectance(DRS) and surface photovoltage spectra(SPS) techniques. The results show that 2/100(Pd/Zn) prepared has the highest photoinduced charge separation rate. XRD results indicate that no peaks of Pd are detected in the 2θ region from 20° to 60°. Pd/ZnO absorbs much more light than ZnO in the visible light region. Among all of the photocatalysts prepared, the 2/100(Pd/Zn)sample possesses the best photocatalytic activity. High photoinduced charge separation rate is beneficial to the photocatalytic activity of ZnO.