반도체 제조 가상계측 공정변수를 이용한 웨이퍼 수율 예측 방법론

Yield prediction is one of the most important topics in semiconductor manufacturing. Especiall y, for a fast-changing environment of the semiconductor industry, efficient forecasting techniq ues are required. In this study, we propose a procedure to predict wafer yield using classificat ion algorithms. The proposed procedure addresses imbalance problems frequently encountered in semiconductor processes so as to construct reliable prediction models. The effectiveness and applicability of the proposed procedure was demonstrated through a real data from a leading semiconductor industry in South Korea.