Optical properties of large-size and damage-free polished Lu2O3 single crystal covering the ultraviolet-visible-and near-infrared (UV–VIS–NIR) spectral region

Lu2O3 has attracted widespread attention in high-power lasers, scintillators, and semiconductors due to its high thermal conductivity, high stability, and large band gap. Due to the limitations of the growth process, high-precision characterization of polished quality and optical properties for large-size Lu2O3 single crystal is extremely scarce, which hinders the design and optimization of optics based on Lu2O3. In this study, we design a systematic machining scheme for large-size Lu2O3 single crystal thick chip to obtain polished crystal with virtually no surface and subsurface damage. The surface/subsurface quality was evaluated utilizing optical profilometer, scanning electron microscope, and transmission electron microscope. Variable-angle spectroscopic ellipsometer was employed to measure the optical constants over wide spectral region (210–1690 nm), removing the lack of optical constants of Lu2O3 single crystal in the ultraviolet region. The band gap is analyzed based on the optical constants results. The consistency of the measured data with the relevant literature verifies the reliability and accuracy of the measurement method along with the data. The surface/subsurface damage inspection method provides an effective approach for ultra-precision machining mechanism research and process optimization of Lu2O3 and other hard and brittle materials. The band gap and the optical constants in wide spectral region provide critical fundamental data for the design and performance optimization of related optics.