氮化硼
材料科学
氮化物
硼
纳米技术
薄膜
工程物理
光电子学
工程类
有机化学
化学
图层(电子)
作者
Hangsheng Yang,Anmin Nie,Jianying Zhang
出处
期刊:Chinese Physics
[Science Press]
日期:2009-01-01
卷期号:58 (2): 1364-1364
被引量:8
摘要
Cubic boron nitride (cBN) thin films, as artificially prepared materials, have excellent mechanical, thermal, electronic and optical properties, thus have potentially significant technological applications in cutting tools, high-temperature electronic devices, and protective coatings for optical elements. Cubic BN films have attracted worldwide attention since the early 1980s; however, a numbers of difficulties hindered their applications. In this paper, recent important achievements in cBN film preparation are reviewed, and perspectives for future study of cubic boron nitride film are presented.
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