发光二极管
材料科学
光电子学
外延
金属有机气相外延
蓝宝石
图层(电子)
二极管
化学气相沉积
氮化镓
基质(水族馆)
宽禁带半导体
光学
激光器
纳米技术
物理
地质学
海洋学
作者
Rahil Izzati Mohd Asri,Nur Atiqah Hamzah,Mohd Anas Ahmad,Ezzah Azimah Alias,M.A.A.Z.M. Sahar,Mundzir Abdullah
标识
DOI:10.1504/ijnt.2022.124514
摘要
Optimisation for p-GaN epitaxial growth temperature ranges from 920°C to 1020°C was successfully conducted on InGaN/GaN blue light-emitting diodes (LEDs). These InGaN/GaN blue LEDs have been grown on patterned sapphire substrates (PSS) via metal organic chemical vapour deposition (MOCVD). The significance of p-GaN growth temperature was studied in detail according to the structural and optoelectronic performances of InGaN/GaN blue react to depth mechanism of surface evolution to LEDs grown on PSS. From experimental analysis, increment in the epitaxial growth temperature of p-GaN layer caused the crystalline quality of GaN and structural properties slightly improve. Other than that, there are decrement of RMS roughness and PL FWHM due to the increment in the epitaxial growth temperature of p-GaN layer. However, the epitaxial growth temperature of p-GaN increase led to no improvement of optoelectronic properties of InGaN/GaN blue LEDs. The LEDs with higher epitaxial growth temperature of the p-GaN layer show poorer optoelectronic properties. Therefore, the optimised epitaxial growth temperature of the p-GaN layer is of significant importance in achieving highly efficient InGaN/GaN blue LEDs.Besides that, introducing PSS as the substrate did not demonstrate high impact to achieve better performance LEDs. Further improvement of the p-GaN layer crystalline and structural quality might be required for the optimisation of the optoelectronic properties of InGaN/GaN blue LEDs.
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