计量学
波前
光子学
炸薯条
自适应光学
相(物质)
干涉测量
计算机科学
集成光学
波前传感器
高斯分布
光学
光子集成电路
全息术
高斯光束
材料科学
集成电路
物理
相位调制
电子工程
光刻
光电子学
数据采集
旋涡
平版印刷术
激光器
作者
Wenyu Chen,Zixin Zhao,Renjie Zhou,Nicholas X. Fang,Weijie Deng,Liang Gao,Hui Deng,Shiyuan Liu,Jinlong Zhu
标识
DOI:10.1002/lpor.202500710
摘要
Abstract Point‐of‐care diagnostics, in situ monitoring during nanomanufacturing, and in‐line metrology are stimulating demands for portable, ultracompact, and robust optical imaging and metrology systems. In this paper, an on‐chip computational wavefront sensor (OCWS) is proposed and demonstrated by fusing photonic integrated circuits and single‐layer metasurfaces. By simultaneously measuring the optical intensities coupled into the metagratings, OCWS enables the single‐shot acquisition of two orthogonal phase gradient images, from which the wavefront can be computationally reconstructed. Moreover, phase imaging of vortex beams and Gaussian phases is experimentally performed using the OCWS system. This miniaturized system may catalyze diverse applications such as point‐of‐care diagnostics, endoscopy, in situ QPI, and in‐line surface profile measurement.
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