A Novel Fabrication Method of Microlens Array by Surface Tension and Injection Process

A novel and simple method on fabricating ultraviolet curable polymer microlens array on silicon membrane and cantilever by injection process is presented. The radius of curvature of microlens can be tuned by liquid polymer surface tension and applied pressure. The polymer microlens array, with a diameter of 17 mum, a pitch of 30 mum on silicon membrane and cantilever are successfully fabricated to demonstrate the feasibility of the proposed method. Also, it is shown that different curvature radius of microlens can be fabricated, and the proposed method has potential to integrate with other optical device.