In situ doping of epitaxial diamond with germanium by microwave plasma CVD in GeH4–CH4–H2 mixtures with optical emission spectroscopy monitoring

Doping of homoepitaxial diamond films by microwave plasma CVD in GeH 4 –CH 4 –H 2 mixtures with in situ control using optical emission spectroscopy is performed to produce germanium-vacancy (GeV) color centers emitting in yellow spectral range.