努氏硬度试验
材料科学
断裂韧性
维氏硬度试验
复合材料
弹性模量
硬度
杨氏模量
压痕硬度
氟化物
微观结构
化学
无机化学
作者
Julie L. Ladison,James J. Price,J. D. Helfinstine,W. Rösch
出处
期刊:Optical Microlithography XVIII
日期:2005-05-12
卷期号:: 146-146
被引量:19
摘要
Knoop and Vickers hardness, Young's Modulus, and fracture toughness measurements were performed on Corning's Code 9575 calcium fluoride in various orientations. Other commercially available sources of calcium fluoride were also measured for comparison of properties. Knoop hardness and elastic properties exhibited a dependence on orientation while no such dependence was observed for Vickers hardness and fracture toughness. The results also indicated that these physical properties were not dependent on the source of the material
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