Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) for materials characterization

Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) are highly versatile methodologies for 2D and 3D materials characterization. The high spatial resolution of SEM and TEM, from nano- to microscale in both imaging and chemical characterization modes, is highly complementary to other nondestructive materials characterization techniques covered later in this book. In this chapter we cover the basic principles underpinning the use of electron microscopy, and give an overview of the core methodologies available in SEM and TEM. The range of useful signals generated by electron–matter interactions are described, and related to the SEM and TEM techniques that make use of them. The application SEM and TEM to the evaluation of key microstructural features of materials including surface topography, grain size, and local chemistry is discussed, and an overview of topical applications given.