Erbium silicates and Yttrium and Ytterbium co-doped Er silicates have been fabricated in sol-gel and sputtering methods. Two orders of magnitude photoluminescence intensity enhancement was observed by Yttrium and Ytterbium co-doping Er silicates compared with that of pure Er silicate. Three kinds of waveguide structure, the strip-loaded, slot and hybrid ErYb/Y silicates waveguides have been obtained, and the optical amplification was observed in these waveguide structures. 1.53μm electroluminescence in ErYb silicates was also realized using hot carriers’ impact excitations of Er ions.