Review of microstructures processing and its system by femtosecond laser

Femtosecond laser micromachining technology,owing to its ultrashort laser pulses and unique advantages,has become the hot issues in materials processing and one of the innovative frontiers in the field of micro / nano manufacturing and ultra- precision machining technology. Introduces the background of femtosecond laser micro- processing technology,comparing with the existed technologies,explores the advantages and characteristics of ultrashort pulses as a tool for ultraprecise material removal in micromachining. Summary the typical examples of microstructures processed by femtosecond laser,which have wide applications in industrial manufacturing,life science and optics. Latest femtosecond laser micro-processing systems in domestic and oversea areas are also reported. Finally,the development trends of femtosecond laser micromachining and some key techniques demanded to be solved are suggested.