Ce-substituted yttrium iron garnet films have been epitaxially grown on [111]-oriented gadolinium gallium garnet substrates by pulsed laser deposition technique. X-ray diffraction measurements show epitaxial growth of the garnet film along its [111] axis. The films were grown at substrate temperature of 790/spl deg/C and various oxygen partial pressure varying from 10 to 100 mTorr. From the magnetic properties measured by VSM, we found that the fabricated (CeY/sub 2/)Fe/sub 5/O/sub 12/ films have in-plane magnetization with no preferential easy direction in the plane. The saturation Faraday rotation values obtained from measurements at /spl lambda/=633 nm and room temperature are found to be dependent on the oxygen pressure, with the maximum value of 0.7 deg//spl mu/m for the films grown at 50 mTorr.