Film bulk acoustic formaldehyde sensor with layer-by-layer assembled carbon nanotubes/polyethyleneimine multilayers

Trace formaldehyde vapor was detected by a micron-scale AlN film bulk acoustic resonator based on mass-sensitive mechanism. The layer-by-layer carbon nanotubes/polyethyleneimine multilayers were assembled on the resonator surface as the sensitive coating. An almost linear decrease of the resonant frequency was observed as a function of the number of nanotubes/polyethyleneimine periods. The multilayers showed a random and porous structure and thus provided a large specific surface area for gas adsorption and diffusion. At the same time, the amine groups in polyethyleneimine had an strong affinity to formaldehyde with excellent selectivity. When exposed to gaseous formaldehyde, the attachment of gas molecules induced a small decrease in the resonant frequency, which made the sensor easily detect formaldehyde at ppb levels with 1 min response time. A linear relationship was observed between the formaldehyde concentrations and the frequency downshift of the resonator. The layer number had an obvious influence on the absorption/desorption behavior of formaldehyde. The gas sensitivity of FBAR sensors was 1.29–1.90 kHz ppb−1 with the limit of detection of 24–38 ppb.