栅栏
衍射
衍射光栅
沟槽(工程)
时域有限差分法
光学
衍射效率
表面粗糙度
材料科学
闪耀光栅
流离失所(心理学)
宏
表面光洁度
物理
计算机科学
心理治疗师
复合材料
程序设计语言
冶金
心理学
作者
Yaowen Ban,Biao Lei,Guoyong Ye,Guobo Zhao,Zhenghui Zhang,Hongzhong Li
标识
DOI:10.1109/icoim52180.2021.9524409
摘要
The grating is the displacement measurement standard, and the diffraction efficiency of the diffracted light of the grating mainly determines the accuracy of the displacement measurement system. In this work, through three-dimensional finite-difference time-domain (FDTD) method simulation, the diffraction efficiency of the ±1 st order diffracted light of the transmission diffraction grating under different macro complex groove types and micro surface roughness is studied, and the optimal groove type and surface roughness parameters were obtained. The research results provide a basis for the optimal design of grating manufacturing.
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