Spectral fitting method for obtaining the refractive index and thickness of chalcogenide films

Spectral fitting method (SFM) was proposed to obtain the refractive index (RI) and thickness of chalcogenide films based on transmission spectra. It extended the Swanepoel method to the films on the order of hundreds of nanometers in thickness. The RI and thickness of the films can be obtained quickly and accurately by using the SFM based on the transmission spectrum with only one peak and valley. The method’s reliability theoretically was evaluated by simulation analysis. The results showed that the accuracy of the RI and thickness was better than 0.2% by using the SFM regardless of thin or thick film. Finally, the RI and thickness of the new ultralow loss reversible phase-change material Sb 2 Se 3 films were obtained experimentally by the SFM. This work should provide a useful guideline for obtaining the RI and thickness of the transparent optical films.