Modeling and experiment on elastic region low defect jet polishing for fused quartz

This paper preliminarily designs array nozzles according to different nozzle processing time and flow requirements, and analyzes the pressure distribution and fluid velocity of different combination array nozzles by using flow field simulation. It is found that the array hole nozzles 5 × 5 and 10 × 10 can remove materials evenly during the actual process without damaging the surface of the workpiece. In addition, fused quartz is processed by using nano-SiO 2 jet polishing. As the removal depth increased, the width to depth ratio gradually increased from 3.34 to 4.71, while the damage threshold also gradually increased from 5.56 J/cm 2 to 6.78 J/cm 2 . Experimental results show that nano-SiO2 jet polishing can indeed blunt scratches and improve the laser damage ability of fused quartz.