Single-channel white light interference vibration-resistant measurement method based on Non-Uniform Fast Fourier transform

White light interference methods for 3D surface reconstruction are non-destructive and highly precise, and are widely used in the measurement of micro-nano structures. However, since these methods are based on the principle of interference, they are susceptible to environmental vibration interference. To address this issue, this project proposes a single channel white light interference anti-vibration measurement method based on non-uniform fast Fourier transform. This method first performs convolution smoothing on the interference signals under a vibration environment to reduce noise interference. Then, it conducts high-precision sampling and reconstruction of the smoothed signals. Finally, by combining the reconstructed signals with the centroid method, the 3D surface information of the object is restored. Experimental results show that the single-channel non-uniform Fast Fourier transform method exhibits better vibration resistance compared to frequency-domain filtering methods across various measurement scenarios, and can more effectively recover the 3D shape of objects in vibrating environments.