Scalable, top-down optical lithography for electrically contacting monolayer crystallites of vapor grown WSe2 for gas sensing applications

Article discusses how semiconducting two-dimensional transition-metal dichalcogenides (TMDs) have garnered a great deal of interest owing to their large surface-to-volume ratios compared to traditional three-dimensional (3D) semiconductors, and focuses on a specific TMD; tungsten diselenide (WSe₂). In their study, the authors demonstrate the halide-assisted low-pressure chemical vapor deposition (HA-LPCVD) of high crystalline-quality, monolayer WSe₂.