Advances in Bio-Microelectromechanical System-Based Sensors for Next-Generation Healthcare Applications

Microelectromechanical system (MEMS)-based sensors have become essential in various fields, including healthcare, automotive, and industrial applications. These sensors integrate mechanical structures and electronics on a single chip, allowing precise, compact, and efficient measurements of parameters like pressure, force, acceleration, and chemical reactions. In this context, this review article presents the essential role of MEMS sensors in healthcare applications. In healthcare, MEMS sensors are widely used for monitoring vital signs, detecting glucose levels, managing cardiovascular and intracranial pressure, and enhancing drug delivery systems. They are also key in tactile sensing during surgeries and in improving neuromuscular monitoring through electromyography (EMG). Despite their advantages, such as small size, low energy consumption, and high performance, MEMS sensors face challenges like sensitivity drift, durability concerns, and long-term calibration stability. This article addresses these limitations and highlights ongoing advancements aimed at improving sensor accuracy, energy efficiency, and adaptability to diverse environments. By examining current trends and innovations, this review provides insights into how MEMS technology is driving breakthroughs in biomedical research, early cancer diagnosis, and bioimaging treatment. We have discussed inertial sensors, MEMS-based glucose sensors, intraocular pressure (IOP) sensors, intracranial pressure sensors, cardiovascular pressure sensors, tactile sensors, and smart inhalers. In addition, we have explored recent advancements in MEMS technologies applied to healthcare, particularly in microfluidic MEMS chips and brain-machine interfaces, with a focus on developments from the last five years. Future research directions focus on enhancing the flexibility, reliability, and energy efficiency of MEMS sensors, positioning them as key components in the next generation of healthcare and medical devices.