通量
薄膜
氧气压力
材料科学
微波食品加热
氧气
激光器
光电子学
脉冲激光沉积
分析化学(期刊)
化学
光学
纳米技术
环境化学
计算机科学
物理
电信
有机化学
作者
Zixiong Liu,Changdong Liu,Haotian Gao,Zongquan Gu
摘要
The impacts of growth oxygen pressure and laser energy in the pulsed laser deposition on the structural, chemical, and electrical properties of Ba0.8Sr0.2TiO3 ferroelectric thin films were investigated. The relative Ba: Sr: Ti ratio in the films was correlated with the capacitance C–voltage V tuning characteristics for the application of microwave tunable capacitors. An enhanced C–V tunability higher than 4:1 was obtained at 1.2 J/cm2 and 40 mTorr and the quality factor Q exhibited resonant pattern as functions of frequency (1–10 GHz) and applied electric field (0–233 kV/cm). Second-order microwave filters were derived from the interdigital capacitor covering the microwave L (1–2 GHz), S (2–4 GHz), and C (4–8 GHz) bands.
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