Review and comparison of layer transfer methods for two-dimensional materials for emerging applications

图层(电子) 计算机科学 纳米技术 材料科学 化学
作者
Thomas F. Schranghamer,Madan Sharma,Rajendra Singh,Saptarshi Das
出处
期刊:Chemical Society Reviews [Royal Society of Chemistry]
卷期号:50 (19): 11032-11054 被引量:170
标识
DOI:10.1039/d1cs00706h
摘要

Two-dimensional (2D) materials offer immense potential for scientific breakthroughs and technological innovations. While early demonstrations of 2D material-based electronics, optoelectronics, flextronics, straintronics, twistronics, and biomimetic devices exploited micromechanically-exfoliated single crystal flakes, recent years have witnessed steady progress in large-area growth techniques such as physical vapor deposition (PVD), chemical vapor deposition (CVD), and metal-organic CVD (MOCVD). However, use of high growth temperatures, chemically-active growth precursors and promoters, and the need for epitaxy often limit direct growth of 2D materials on the substrates of interest for commercial applications. This has led to the development of a large number of methods for the layer transfer of 2D materials from the growth substrate to the target application substrate with varying degrees of cleanliness, uniformity, and transfer-related damage. This review aims to catalog and discuss these layer transfer methods. In particular, the processes, advantages, and drawbacks of various transfer methods are discussed, as is their applicability to different technological platforms of interest for 2D material implementation.
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