Properties of High-Quality Flexible Graphite Film and Its Preparation by the Pyrolytic CVD Method

Pyrolytic chemical vapor deposition (CVD) of hydrocarbon containing oxygen atoms yields free-standing conductive carbonaceous films of 450 S/cm. With further heat-treating at a higher temperature, the obtained film is converted to high quality graphitized film with a conductivity of 1.6×104 S/cm for the 2800°C treatment, which is of the same order of magnitude as that of highly oriented pyrolytic graphite (HOPG). The electrical conductivity and thermoelectric power of the films are examined as a function of the heat-treatment temperature. The temperature dependence of thermoelectric power is also confirmed to be the same as that of HOPG.