Predictive Analytics for Equipment Maintenance Operations

Predictive maintenance (PdM) is a key application of data analytics in semiconductor manufacturing. The optimization of equipment performance has been found to deliver significant revenue benefits, especially in the wafer fabrication process. This chapter addresses two main research objectives: first, to investigate the particular challenges and opportunities of implementing PdM for wafer fabrication equipment and, second, to identify the implications of PdM on key performance indicators in the wafer fabrication process. The research methodology is based on a detailed case study of a wafer fabrication facility and expert interviews. The findings indicate the potential benefits of PdM beyond improving equipment maintenance operations, and the chapter concludes that the quality of analytics models for PdM in wafer fabrication is critical, but this depends on challenging data preparation processes, per machine type. Without valid predictions, decision-making ability and benefits delivery will be limited.