X射线光电子能谱
表征(材料科学)
纳米技术
口译(哲学)
材料科学
光电发射光谱学
钥匙(锁)
桥(图论)
工作(物理)
结合能
计算机科学
能量(信号处理)
光谱学
化学
电荷(物理)
数据收集
电子光谱学
化学过程
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2026-06-01
卷期号:44 (4)
被引量:2
摘要
X-ray photoelectron spectroscopy (XPS) is a widely used technique for the chemical analysis of solid surfaces, sensitive to the chemical environments of atoms via core-level binding energy shifts. While modern instruments allow experimental data to be acquired with ease, their evaluation and interpretation remain challenging for newcomers to the field, as a profound knowledge of the method is required for correct analysis. Here, we present a concise yet comprehensive overview of the fundamental principles and methodologies of XPS, covering photoemission processes, chemical shifts, charge referencing, peak fitting, and quantification strategies. This overview aims to bridge the gap between data collection and reliable analysis, providing essential knowledge for correct interpretation. By clarifying key concepts and common practices, this work supports improved accuracy in surface chemical characterization using XPS.
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