Recent Developments of Micro-Bolometer Using Double Sacrificial Layers

In order to develop high resolution uncooled infrared microbolometer with smaller pixel size,cell structure with double sacrificial layers is a new trend and the most common way for microbolometers.This article described the recent research results of microbolometer using double-sacrificial layer in Raytheon company and DRS company,also compare the structure and fabricating process of two kinds of designs were compared.