溅射
产量(工程)
级联
动量(技术分析)
机械
热的
激发
Spike(软件开发)
分子动力学
材料科学
物理
化学
热力学
纳米技术
财务
经济
薄膜
色谱法
量子力学
管理
作者
Mario M. Jakas,Eduardo M. Bringa,R. E. Johnson
出处
期刊:Physical review
[American Physical Society]
日期:2002-04-10
卷期号:65 (16)
被引量:75
标识
DOI:10.1103/physrevb.65.165425
摘要
The sputtering yield Y from a cylindrical thermal spike is calculated using a two-dimensional fluid-dynamics model which includes the transport of energy, momentum, and mass. The results show that the high pressure built up within the spike causes the hot core to perform a rapid expansion both laterally and upwards. This expansion appears to play a significant role in the sputtering process. It is responsible for the ejection of mass from the surface and causes fast cooling of the cascade. The competition between these effects accounts for the nearly linear dependence of Y with the deposited energy per unit depth that was observed in recent molecular-dynamics simulations. Based on this we describe the conditions for attaining a linear yield at high excitation densities and give a simple model for this yield.
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