Structural and optical properties of Zn-doped β-Ga2O3films

Intrinsic β-Ga 2 O 3 and Zn-doped β-Ga 2 O 3 films were prepared using RF magnetron sputtering. The effects of the Zn doping and thermal annealing on the structural and optical properties are investigated. In comparison with the intrinsic β-Ga 2 O 3 films, the microstructure, optical transmittance, optical absorption, optical energy gap, and photoluminescence of Zn-doped β-Ga 2 O 3 films change significantly. The post-annealed β-Ga 2 O 3 films are polycrystalline. After Zn doping, the crystallization deteriorates, the optical band gap shrinks, the transmittance decreases and the UV, blue, and green emission bands are enhanced.