A large-aperture, piston-tip-tilt micromirror for optical phase array applications

This paper reports the design, fabrication and characterization of a 4x4 micromirror array consisting of piston-tip-tilt electrothermal MEMS mirrors. Each mirror has an optical aperture size of 0.5x0.5 mm ² . Both tip and tilt angles of over plusmn30deg are obtained at less than 5 Vdc, and the piston displacement reaches 215 mum at 4 Vdc. Two-dimensional scanning was demonstrated. Thermal analysis and transient response were also reported.