Laser Beam Micromachining and Fabrication

Micromachining of advanced materials with high resolution at the submicron level requires an extremely precise processing tool that can be effectively integrated and automated to produce micro-components of complex profiles. The developments of ultrafast lasers have opened a new avenue for laser beam micromachining (LBMM) in terms of 3D micro-structuring and surface modification. The ultrafast lasers with pulse duration of femtosecond to picosecond can be effectively used to tailor the electrical, mechanical, tribological, and optical properties of different materials through surface structuring. Due to nonlinear absorption at a wavelength corresponding to ultrashort, laser micromachining can be conveniently used to fabricate photonic devices. Since the absorption process of lasers having ultrafast pulse duration is independent of mechanical and tribological properties, so, the optical devices can be easily fabricated by the LBMM process. In the present chapter, the basic mechanism of ultrafast lasers and their interaction 140with materials have been discussed. Instead of this, the unique capabilities of short and ultra-short laser pulses with their potential for micromachining and microfabrication have been presented in such a way that it becomes easier for readers to understand the basic concept of the LBMM process.