Influence of Technological Parameters of Deposition on Physical and Mechanical Properties of Vacuum-Arc Multilayer Nitride Coatings Based on Chromium and Niobium

Establishing the regularities of the structure and phase formation of vacuumarc multilayer nitride coatings at different technological parameters is important for the predicted obtaining of the required properties of multilayer systems.To analyse the influence on the physical and mechanical properties, the following technological parameters of deposition vacuum-arc multilayer nitride coatings are chosen: pressure of the reaction gas in the vacuum chamber (0.08-0.27Pa), constant negative voltage on the substrate (70-200 V), layer thickness (17-150 nm) and number of layers (68, 270, 1080).Chromium and niobium nitrides, which are promising materials in many fields of application, are chosen as components of vacuum-arc coatings.The research show that vacuum-arc multilayer nitride coatings СrN/NbN obtained under different technological conditions have high planarity of layers and practically no drop phase in the volume of the coating.The analysis of heterogeneity of the structural and phase state of the coatings is carried out by the root-mean-square deviation