多边形网格
计算
平滑度
参数统计
趋同(经济学)
公制(单位)
维数之咒
计算机科学
数学
反向
操作员(生物学)
算法
应用数学
数学优化
拓扑(电路)
数学分析
人工智能
几何学
生物化学
统计
运营管理
化学
抑制因子
组合数学
转录因子
经济
基因
经济增长
作者
Yongming Shen,Yayi Wei
摘要
We propose a new model for active contours in inverse lithography based on a geometric partial differential equation. By cognitive analogy to the classic ‘snakes” model, the closed parametric contour of the interesting layout pattern is evolved under smoothness control, the influence of a distance-metric minimizing image force and an additional distance-regularized level-set (DRLS) pressure force. Numerical implementation is performed locally in the vicinity of zero levelsets with additive operator splitting (AOS) based semi-implicit differencing tenable for sufficient large stepsizes. Simulation results show that the computation efficiency is improved with reduced optimization dimensionality and the convergence efficiency is improved with sufficiently large stepsize when semi-implicit scheme is applied.
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