Rapid Synthesis of Yttria-Stabilized Zirconia Films by Laser Chemical Vapor Deposition

Yttria stabilized zirconia (YSZ) films were synthesized at a high deposition rate of 180 nm/s (660 μm/ h) by laser chemical vapor deposition (laser CVD) using Zr(dpm) 4 and Y(dpm) 3 precursors. Morphology of YSZ films changed from columnar to cone structure with increasing deposition rate. YSZ films with the columnar structure showed significant (200) orientation.