Study of Electrical and Optical Properties of Transparent Conductive In-doped ZnO Thin Films

Transparent conductive thin films of un-doped and In-doped ZnO thin films have been prepared by RF magnetron sputtering.The influence of In doping on the structure,electrical and optical properties of the films were studied.It shows that the crystal quality of the films get better,the surface get dense and smooth and the transmittance of the films change slightly as doping In into the films.The substitution of Zn2+ by In3+ in the films gives lots of electron,which act as free carriers,and enhance the conductivity of the films.The lowest resistivity of the films obtained is 4.3×10-3 Ω·cm,and all the films has a high transmittance of 85% in the visible range.