Spin-coating behavior of resist for rectangular ferrite substrate

Resist was coated on the rectangular ferrite substrate by spin-coating route of semiconductor technology,and the relation were investigated between thickness and uniformity of resist and the spin-coating speed and time.The thickness of resist gradually decreases with increasing spin-coating speed.For spin-coating speed of faster than 2500 r/min,the thickness difference of resist is within 5%.Meanwhile,the thickness of resist decreases with prolonging spin-coating time and finally tends to reach a constant value.The thickness difference of resist is within 5% as the spin-coating time is over 20s.At last,the effect of spin-coating center was analyzed on the spin-coating behavior.