The Study of Ultra-low Voltage Protection Device ESD Design and Process

This paper introduces the work principle and structure of new ultra-low voltage protection device,and the structure simulation.By the theory analysis and simulation,we get the 1.8～5 V ultra-low voltage ESD protection device models.After design and process validation,we manufacture the ultra-low voltage protection device having very similar results to the simulation.This device's main specialties are: low working voltage,low capacitance and low leakage.As the devices adopt new complex punch-through structure,low temperature and low pressure epitaxial technology,the electricial parameters have perfect consistent.In the high speed data line protection circuit,the device is successful used.