Designing High-Efficiency Interference Coatings With Atomic Layer Deposited TiO^2 Layers
作者
Jennifer D. Kruschwitz
出处
期刊:日期:2007-01-01卷期号:: WA6-WA6被引量:1
标识
DOI:10.1364/oic.2007.wa6
摘要
Atomic Layer Deposition (ALD) has enabled the manufacturing of high-efficiency optical interference coatings. This paper reviews the interference coating designing methodology necessary to use TiO2 as an optical material when deposited using ALD.