Tribological Properties of the ZrN Coatings by DC Magnetron Sputtering

ZrN thin films were successfully deposited by DC magnetron sputtering on die steel substrates. The objective of this study was to investigate heat treatment on the microstructure, morphology, nanohardness properties determined by X-ray diffraction, field-emission scanning electron microscope (FE-SEM), nanoindentation, and pin-on-disk, respectively. The XRD result shows that ZrN has intensity of (111) and (200) peak after 400 °C for 1 h at lower nitrogen flow rates. The surface of coatings revealed smaller grains and smooth surface under heat treatment. ZrN coatings consisted of lower nitrogen flow rate had much lower friction coefficient, better mechanical properties by annealing treatment process.