Hybrid Micro-Vibration Control of Device Platform under Environment Excitation

In this paper,vibration isolation platform of the characteristics of the study,active vibration isolation with a combination of passive hybrid vibration isolation technology,the establishment of air springs for passive vibration isolation components,giant magnetostrictive actuators for active vibration isolation high-precision equipment component vibration isolation system platform.According to the designed vibration isolation system,PID simulation is done in SIMULINK with the comparison for passive control system,studying the effect of active control,and we take comparison and research between situation with and without consideration of coupled structures.Establishing test model of platform system and structure and taking structure modal test.We design and manufacture a vibration isolation system and a three-tier structure model,testing the vibration effects with PID control algorithm,and the test results will be compared with the analysis results and simulation results.