薄膜晶体管
材料科学
X射线光电子能谱
阈值电压
无定形固体
薄膜
光电子学
晶体管
铟
氧化铟锡
饱和(图论)
镓
压力(语言学)
氧化物
分析化学(期刊)
纳米技术
图层(电子)
电压
化学工程
结晶学
化学
电气工程
冶金
工程类
哲学
组合数学
色谱法
语言学
数学
作者
Hyunjin Kim,Seohyun Maeng,Soobin Lee,Jaekyun Kim
标识
DOI:10.1021/acsaelm.0c01048
摘要
Solution-processed indium gallium tin oxide (InGaSnO, IGTO) thin film transistors (TFTs) are investigated as promising low-cost and stable materials for high-performance amorphous oxide semiconductor (AOS)-based TFTs in display applications. After tailoring the metal cation composition in IGTO thin films, the IGTO (7:1:1) AOS TFT shows a saturation mobility and current on/off ratio of 2.13 cm2 V–1 s–1 and 2.55 × 107, superior to the IGZO TFT. It was found that the threshold voltage (Vth) shifts of IGTO TFTs with higher Sn molar ratios became gradually diminished both under the positive bias stress (PBS) test, from +7.3 to +1.1 V, and under the negative bias stress (NBS) test, from −2.83 to −0.94 V, due to the increased concentration of Sn–O complexes with relatively higher bonding energies within IGTO thin films. X-ray photoelectron spectroscopy (XPS) analysis also reveals that IGTO thin films with higher Sn composition ratio tend to effectively suppress the formation of oxygen vacancy, which consequently led to the improved stability of IGTO-based TFTs under the gate bias stress. Therefore, these results can be the basis for improving the characteristics of IGTO semiconducting channel systems for low-cost switching devices in the display applications.
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