计算
光学
计量学
图像拼接
干涉测量
半径
曲面镜
表面计量学
空白
材料科学
物理
计算机科学
工程类
机械工程
轮廓仪
表面光洁度
计算机安全
作者
François Piché,Chris Maloney,Steve VanKerkhove,Chris Supranowicz,Paul Dumas,Keith Donohue
摘要
This paper describes the manufacturing steps necessary to manufacture hemispherical concave aspheric mirrors for high- NA systems. The process chain is considered from generation to final figuring and includes metrology testing during the various manufacturing steps. Corning Incorporated has developed this process by taking advantage of recent advances in commercially available Satisloh and QED Technologies equipment. Results are presented on a 100 mm concave radius nearly hemispherical (NA = 0.94) fused silica sphere with a better than 5 nm RMS figure. Part interferometric metrology was obtained on a QED stitching interferometer. Final figure was made possible by the implementation of a high-NA rotational MRF mode recently developed by QED Technologies which is used at Corning Incorporated for production. We also present results from a 75 mm concave radius (NA = 0.88) Corning ULE sphere that was produced using sub-aperture tools from generation to final figuring. This part demonstrates the production chain from blank to finished optics for high-NA concave asphere.
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