62‐3: Invited Paper: High‐Mobility Metal‐Oxide TFT Development for IT AMOLED Applications

In this paper, we demonstrated the high mobility metal oxide TFTs with small Vth variation and good electrical reliability in Gen. 6 and Gen. 4.5 factory. Moreover, The 13.2 and 12.6 inch AMOLED displays have been successfully developed with MO‐1 and MO‐2 backplane technology, respectively. Furthermore, the MO‐3 metal oxide TFTs were fabricated with high mobility (55 cm 2 /Vs) by using atom layer deposition (ALD) technology.