Micro-LED for AR applications

Micro-LEDs have the potential to create a generational change in display technology for the entire $160B display market. What is continuing to push out the broad adoption of Micro-LED across the display market is a missing “beachhead” market equivalent to the laptop market that began the decades long adoption of LCD across the entire display market. An AR glasses solution used as widely as vision correction glasses will fundamentally alter the way people interact with digital information and Mojo Vision believes AR glasses can be this “beachhead” market for Micro-LED. Mojo Vision is developing full Micro-LED displays based on GaN/Si blue LED + CMOS + Quantum dot color conversion. A development history will be given showing milestones, key technology process blocks and current status. A 300mm process fully compatible with GaN/Si wafers run in parallel with CMOS wafers in a standard 300mm CMOS fab is considered essential to reaching the Micro-LED display price point required for mass adoption. This paper will focus on development of a full wafer to wafer hybrid bonding flow for integration of CMOS to GaN/Si blue Micro-LEDs at 300mm done in collaboration with Applied Materials.