Synthesis, dielectric characteristic, and microstructure of acetate-based (Ba,Sr)TiO 3 thin films

A modified sol-gel process with acetate based precursor solutions for Sr-doped barium titanate thin films is presented. A four-step heating procedure was employed to prepare the Ba0.8Sr0.2TiO3 thin films. The thermal decomposition and crystallization temperatures of the precursors were determined by means of FTIR, TGA/DTA, and XRD measurements. The nonlinear C-V characteristics are due to strong depletion that can not originate from the BST/electrode interface, but must come internally from the BST films.