Design of a Flexible Microwave-Induced Room-Temperature Atmospheric-Pressure Microplasma Source

A microwave-induced room-temperature atmospheric-pressure flexible microplasma source based on a resonant microstrip array structure was designed. This device was a simple structure with a small size, low power requirement, and flexibility. The utilization of a resonant microstrip was to reduce the excitation power requirement and plasma temperature. An array structure was adopted to achieve a larger plasma area. Experiments showed that it can induce an argon discharge at atmospheric pressure with as low as 20 W microwave input power. The temperature was around 30 $^{\circ}$ C. This device was designed to be suitable to manipulate different material treatments without being affected by the shape of the material itself.