Scalable microfabrication of monolithic integrated microbatteries with ultra-high voltage output and excellent customizability

The burgeoning Internet of Things demands highly customizable microbatteries (MBs) to power miniaturized electronics, yet challenges exist in fabricating ultra-small MBs and integrating customizable modules within confined areas. Herein, we report a novel photolithographic microfabrication strategy enabling the large-scale production of monolithic integrated ultra-small MBs. The approach utilizes photoresist grooves as micropattern templates and employs a non-destructive mechanical peeling process to fabricate precise MBs with a compact area of 2.2275 mm² by using Li₃V₂(PO₄)₃ as both the cathode and the anode. These MBs demonstrate an exceptional areal capacity of 96.4 μAh cm^-2 and remarkable cycling stability, retaining 88.3% of their initial capacity after 10 000 cycles. Furthermore, the method allows the facile serial integration of numerous MBs in a single step, achieving a record voltage of 182.7 V through 63 series-connected units. This breakthrough provides a scalable solution for mass-producing customizable MBs, advancing the power supply capabilities for miniature electronics with high energy density and long-term reliability.