An introduction to microfabrication

Abstract The chapter offers an introduction to microfabrication techniques. Photolithography is presented. Techniques dedicated to hard materials, such as wet and plasma etching, sputtering, bonding, electron beam lithography. Direct writing and 3D printing are shown. Soft lithography, and in particular those using PDMS (PolyDimethylSiloxane) is presented, with applications to valving, pumping, leading to Large Scale Integration Systems. Paper microfluidics is discussed, along with recent technological approaches, such as photosensitive hydrogels, NOA technology, microcontact printing or flow lithography.