铜
明胶
材料科学
冶金
计算机科学
化学
生物化学
作者
Peixin Chen,Silin Han,Tao Hang,Yunwen Wu,Ming Li
出处
期刊:
日期:2022-08-10
卷期号:: 1-3
被引量:2
标识
DOI:10.1109/icept56209.2022.9873166
摘要
(111)-oriented nanotwinned copper (nt-Cu) has a promising prospect in improving the reliability of interconnects in electronic packaging. In the microelectronic industry, the fabrication of (111)-oriented nt-Cu mostly relies on electrodeposition, but the formation mechanism of nanotwins remains unclear. In this paper, we studied the effect of gelatin, an additive that induces the growth of (111)-oriented nanotwins, on the electrodeposition process by microstructural observation and electroanalytical methods. The addition of gelatin promoted the nucleation of (111)-oriented nanotwinned grains and transformed the microstructure from vertical twins to horizontal twins. Electrochemical analysis showed that gelatin had an inhibition effect on the deposition of copper, but it wasn ’ t selectively adsorbed on grains without (111)orientation to facilitate the transition into a (111)-textured film. These findings are instructive in understanding the growth mechanism of (111)-oriented nt-Cu.
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