A Flexible Humidity Sensor Based on Co3O4 Nanoneedles with High Sensitivity and Quick Response

A flexible humidity sensor has been realized based on Co 3 O 4 nanoneedles via a deposition technique. High humidity sensing and excellent flexible properties are observed in the tests. The impedance of the as-prepared sensor decreases by nearly three orders of magnitude with increasing relative humidity (RH) from 11% to 95% on a semilogarithmic scale. The response and recovery times are about 3 and 6 s respectively. The maximum hysteresis is less than 4% under 80% RH. No obvious changes for the sensing performance can be obtained after 100 bending/extending cycles and bending tests. These performances make the current sensor a good candidate for flexible humidity detection.